Method for fabricating semiconductor package substrate having different thicknesses between wire bonding pad and ball pad

ABSTRACT

A method for fabricating a semiconductor package substrate, including: preparing a copper clad laminate and half etching a copper foil on a wire bonding pad side of the copper clad laminate; depositing a first etching resist on the opposite sides of the copper clad laminate; forming circuit patterns on the first etching resist, constructing circuits including a wire bonding pad and a ball pad after the model of the circuit patterns, and removing the first etching resist; applying a solder resist to the copper clad laminate in such a way to expose the wire bonding pad and the ball pad; and plating the wire bonding pad with gold and subjecting the ball pad to surface treatment.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional and claims priority to U.S. applicationSer. No. 11/495,649, filed Jul. 31, 2006 now U.S. Pat. No. 7,768,116,which in turn claims the benefit of Korean Patent Application10-2005-0090019 filed with the Korean Intellectual Property Office onSep. 27, 2005, the disclosures of which are incorporated herein byreference in their entirety.

BACKGROUND

1. Field

The present invention relates to a semiconductor package substrate and amethod for fabricating the same. More particularly, the presentinvention relates to a semiconductor package in which a circuit layerformed on the wire bonding pad side is different in thickness from ahalf-etched circuit layer formed on the ball pad side and which has aconnection through hole through which the plating lead lines of the wirebonding pad side and the ball pad side are electrically connected, sothat electrical disconnection is prevented when the plating lead line ofthe wire bonding pad is cut, and a method for fabricating the same.

2. Description of the Related Art

With the evolution of electronics towards slimness, lightness and highperformance, a great advance in technology for fine circuit patterns hasbeen recently achieved on BGA package substrates.

Particularly, fine circuit patterns are extensively required in CSP(chip-sized package) products, which have semiconductor chips mounted onBGA package substrates.

In order to better understand the background of the invention, aconventional method of fabricating a semiconductor package substratewill be described with reference to FIGS. 1A to 1H.

As shown in FIG. 1A, a copper clad laminate (CCL) 100 comprising aninsulation layer 102 covered with a copper foil 101, which is providedas a base substrate, is drilled to form therein via holes for electriccommunication between circuit layers. There are a variety of CCLsincluding glass/epoxy CCLs, heat resistant CCLs, paper/phenol CCLs, CCLsfor use in radio frequencies, flexible CCLs (polyimide film) andcomposite CCLs, which are used according to purpose. For example,glass/epoxy CCLs are suitable for the fabrication of double-sided PCBsand multilayer PCBs.

Then, the opposite sides of the CCL 100 and the inner walls of the viaholes are subjected to electroless plating and then to electroplating,as shown in FIG. 1B. Requiring electricity, electroplating cannot beconducted on the insulation layer 102. Usually, an insulator iselectroless plated prior to being electroplated. Thus, copper iselectroless plated and then electroplated on the insulation layer 102.

Next, a filler is charged in the via holes 103, followed by theformation of an etching resist pattern 105 as shown in FIG. 1C. Inregard to the etching resist pattern 105, it is formed using a dry film(D/F) and a circuit pattern printed film (artwork film) on thecopper-electroplated substrate.

There are various techniques available for the formation of the resistpattern 105, with a dry film technique prevailing.

A dry film for use in forming the resist pattern, abbreviated to D/F, isusually comprised of a cover film, a photoresist film and a Mylar film.The photoresist film actually serves as a resist.

While being stripped of the cover film, the dry film is applied to abare PCB. A circuit pattern-printed artwork film is stuck fast onto thedry film, followed by UV irradiation. UV light cannot penetrate throughthe dry film at the dark portion of the pattern of the artwork film, butpenetrates through otherwise portions to cure the exposed portion of thedry film. Then, the substrate is immersed in a developing solution toremove the uncured portions of the dry film while the cured portionsremain to form a resist pattern. A 1% sodium carbonate (Na₂CO₃) orpotassium carbonate (K₂CO₃) solution is suitable as a developingsolution.

Afterwards, as shown in FIG. 10, the CCL 100 is treated with an etchantwhile the etching resist pattern 105 serves as a mask, so as to form acircuit pattern.

Subsequently, the etching resist 105 is removed with a peeling solutionsuch as an NaOH or KOH solution, as shown in FIG. 1E.

All portions of the resulting CCL, except for a wire bonding pad 107, asolder ball pad 108, and the other portions connected to externalsubstrates or chips, are coated with a photo solder resist 106 so as toprotect the circuit, as shown in FIG. 1F.

Using a plating lead line, thereafter, the CCL is plated with Ni/Au,with the photo solder resist serving as a plating resist, to form anNi/Au layer 109, 109′ on the uncoated portions, that is, the wirebonding pad 107, the solder ball pad 108 and the other connectionportions, as shown in FIG. 1G. Plating is conducted with Ni and thenwith Au.

Finally, FIG. 1H shows a package product obtained after the circuitpattern 110 serving as a plating lead line is cut using a router or adicing process.

In CSP products, ball pitches have continued to decrease from 0.8through 0.65 and 0.5 then to 0.4 mm. In addition, the balls require anOSP (organic solderability preservative) treatment so as to have a dropresistance the same level as that of substrates for mobile phones.However, the requirement causes contrast techniques to be performed onthe substrate, as will be described below.

With reference to FIG. 2, a conventional semiconductor package substrate210 is shown in a perspective view. As seen, the conventionalsemiconductor package substrate 210 is divided into a unit region,comprising a semiconductor device mounting portion 211 a and an outercircuit pattern 211 b, and a dummy region 212.

This conventional semiconductor package substrate requires contrasttechniques which are used to keep the circuit layer at a small thicknessso as to realize a fine pattern at the side of the wire bonding, but ata large thickness at the side of the balls so as to enable applicationof OSP and deep etching processes to the balls.

SUMMARY

Therefore, it is an object of the present invention to provide asemiconductor package device in which a circuit layer formed on a wirebonding pad side differs in thickness from a circuit layer formed on aball pad side, and a method for fabricating the same.

It is another object of the present invention to provide a semiconductorpackage substrate which prevents electrical disconnection when a platinglead line of a wire bonding pad side is cut as a circuit layer is formedto a small thickness on the wire bonding pad side.

In accordance with an aspect of the present invention, provided is asemiconductor package substrate, comprising: an insulation layer; afirst circuit layer, formed on one side of the insulation layer, forproviding a ball pad; and a second circuit layer, formed on the otherside of the insulation layer, for providing a wire bonding pad, saidsecond circuit layer being thinner than said first circuit layer.

In accordance with another aspect of the present invention, provided isa method for fabricating a semiconductor package substrate, comprising:Step 1 of preparing a copper clad laminate and half-etching a copperfoil on a wire bonding pad side of the copper clad laminate; Step 2 ofdepositing a first etching resist on the opposite sides of the copperclad laminate; Step 3 of forming circuit patterns on the first etchingresist, constructing circuits including a wire bonding pad and a ballpad after the model of the circuit patterns, and removing the firstetching resist; Step 4 of applying a solder resist to the copper cladlaminate in such a way as to expose the wire bonding pad and the ballpad; and Step 5 of plating the wire bonding pad with gold and subjectingthe ball pad to surface treatment.

BRIEF DESCRIPTION OF THE DRAWINGS

The application of the preferred embodiments of the present invention isbest understood with reference to the accompanying drawings, in whichlike reference numerals are used for like and corresponding parts,wherein:

FIGS. 1A to 1H are schematic views showing processes of fabricating aconventional semiconductor package substrate;

FIG. 2 is a perspective view showing the conventional semiconductorpackage substrate;

FIG. 3 is a cross sectional view showing a semiconductor packagesubstrate according to an embodiment of the present invention, in whicha circuit layer formed on a wire bonding pad side differs in thicknessfrom a circuit layer formed on a ball pad side;

FIGS. 4A to 4G are cross sectional views showing processes offabricating a semiconductor package substrate according to an embodimentof the present invention, in which a circuit layer formed on a wirebonding pad side differs in thickness from a circuit layer formed on aball pad side;

FIGS. 5A to 5H are cross sectional views showing processes offabricating a semiconductor package substrate according to anotherembodiment of the present invention, in which a circuit layer formed ona wire bonding pad side differs in thickness from a circuit layer formedon a ball pad side; and

FIG. 6 is a perspective view showing a semiconductor package substratein accordance with the present invention.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Below, a detailed description is given of an embodiment of the presentinvention with reference to the accompanying drawings.

FIG. 3 is a cross sectional view showing a semiconductor packagesubstrate according to an embodiment of the present invention, in whicha circuit layer 304 a on the side of a wire bonding pad differs inthickness from a circuit layer 304 b on the side of a ball pad within aunit region. The circuit layer 304 a of the wire bonding pad side isthinner than the circuit layer 304 b of the ball pad side.

Within a dummy region, however, the thickness is identical between acircuit layer 304 ab on the wide bonding pad side and a circuit layer bbon the ball pad side.

Thereby, when the circuit layer 304 a on the wire bonding pad side inthe unit region is thinner than the circuit layer 304 ab on the wirebonding pad side in the dummy region and than the circuit layer 304 b onthe ball pad side in the unit region, a fine circuit pattern can bedesigned because the thickness of the circuit layer 304 a has a greatinfluence on the fineness of a circuit pattern.

On the wire pad side, the larger thickness of the circuit layer 304 abon the wire bonding pad side in the dummy region than that of thecircuit layer 304 a in the unit region prevents the distortion ofsubstrate.

Additionally, the larger thickness of the circuit layer 304 b on theball pad side than that of the circuit layer 304 a on the wire bondingpad side in the unit region allows OSP and deep etching processes to beapplied to the ball pad side. In FIG. 3, reference numeral 302 refers toan insulation layer, 306 a and 306 b to photo solder resists, 304 aaparticularly to a wire bonding pad out of circular layer 304 a, 304 acto a gold coat, 304 ba to a ball pad, and 304 bc to an OSP-treatedsurface.

A through-hole 307 serves to electrically connect a plating lead line(not shown) of the wire bonding pad side with that of the ball pad side.If the circuit layer 304 a on the bonding pad side becomes thin, thethin plating lead line may be cut because it is contained in the circuitlayer 304 a. When the cutting occurs, the through-hole 307 allowselectric connection to the outside through a plating lead line (notshown) on the ball pad side.

Alternatively, the circuit layer 304 ab on the wire bonding pad side inthe dummy region may be as thick as the circuit layer 304 a on the wirebonding pad side in the unit region, but differs in thickness from thecircuit layer 304 b on the ball pad side in the unit region.

With reference to FIGS. 4A to 4G, a method for fabricating asemiconductor package substrate in which a circuit layer on a wirebonding side is different in thickness from that on a ball pad side areshown in a stepwise manner in accordance with an embodiment of thepresent invention.

FIG. 4A is a cross sectional view of a CCL 400 comprising an insulationlayer 402, made from, for example, epoxy, with copper foil 401 a and 401b bonded through an adhesive to the respective sides of the insulationlayer.

Then, as shown in FIG. 4B, a dry film 403 a which is open at a portioncorresponding to the unit region of the base substrate CCL is depositedon the copper foil 401 a of the wire bonding pad side. While the dryfilm 403 a serves as a mask, the unit region, exposed through the openportion of the dry film 403 a, is half etched so that the copper foil401 a has different thicknesses at the unit region and at the dummyregion.

Because there is no need to half etch the copper foil 401 b on thesolder ball pad side, a blanket of the dry film 403 b is deposited overthe copper foil 401 b on the ball pad side. Alternatively, in the casewhere the copper foil 401 a in the unit region has the same thickness asthat of the copper foil 401 b in the dummy region, a half etchingprocess can be conducted without use of the dry film 403 a, which isopen at a portion corresponding to the unit region of the CCL.

FIG. 4C is a cross sectional view after a half etching process isconducted to remove the copper foil 401 a from the bonding pad side to apredetermined depth in the unit region while the copper foil 401 b onthe ball pad side is protected by the dry film 403 b.

Following the removal of the copper foil 401 a on the bonding pad sidein the unit region to a predetermined thickness by half etching, the dryfilms 403 a and 403 b respectively deposited on the copper foil 401 a ofthe wire bonding pad side and the copper foil 401 b of the ball pad sideare removed, as shown in FIG. 4D.

Since the copper foil 401 a on the wire bonding side in the unit regionbecomes thin, there is possibility that a circuit pattern formed thereonmight be cut. Particularly, when the plating lead line is cut, a platingprocess for a wire bonding pad may be not conducted.

For this reason, as shown in FIG. 4E, a through hole 405 is drilled andplated to form a connection through hole 406 for connecting the copperfoil 401 a on the wire bonding pad side and the copper foil 401 b on theball pad side. The connection through hole 406 serves as an electricbridge between the lower foil 401 b and the upper foil 401 a so that theplating lead line (not shown) formed in the lower copper foil 401 b iselectrically connected with the plating lead line (not shown) formed inthe upper copper foil 401 a. Even if the plating lead line of the uppercopper foil 401 a is cut, as will be described later, a gold platingprocess can be conducted to form a gold coat 408 b on a wire bonding pad408 a (FIG. 4G) using the plating lead line of the lower copper foil 401b, which is connected through the connection through hole 406 to thebonding pad 408.

Preferably, the connection through hole 406 is formed at four corners613 of the unit region 611, as shown in FIG. 6. The reason is that amain plating lead line (not shown) usually passes through the fourcorners 613. That is, when the main plating lead line is cut, the goldplating cannot assure the thickness of the plated gold coat 408 b. Thus,even if the main plating lead line of the upper copper foil 401 a iscut, the presence of the connection through hole 406 at the four corners613 allows an electric current to be provided through the main platinglead line of the lower copper foil 401 b, thus assuring the thickness ofthe gold coat. FIG. 6 shows a semiconductor package substrate 610 inaccordance with an embodiment of the present invention, which is dividedinto a unit region 611 comprising a semiconductor device mountingportion 611 a and an outer circuit pattern 611 b, and a dummy region 612around the unit region 611.

Returning to FIG. 4E, patterned dry films 404 a and 404 b for theformation of circuit patterns on the wire bonding pad side and the ballpad side are deposited over the copper foils 401 a and 401 b,respectively.

FIG. 4F is a cross sectional view after the copper foils 401 a and 401 bare selectively etched using an etchant, with the patterned dry films404 a and 404 b serving as etching resists, followed by removing the dryfilms 404 a and 404 b with a peeling solution. Upon the pattern etching,a plating lead line to be used for gold plating is concurrently formedin the same manner.

Afterwards, the resulting CCL structure is coated with solder resists407 a and 407 b which are then exposed to light, developed, and dried,as shown in FIG. 4G.

In order to plate only the wire bonding pad 408 a with gold, a dry film(not shown) is applied on the solder pad side of the substrate, exposedto light, and developed. Using a plating lead line, the bonding pad 406is plated with gold 408 b with the dry film serving as a plating resist.In detail, electrolytic Au plating is usually conducted for metalfinishing the package substrate on which semiconductor devices are to bemounted. The reason is that electrolytic Au plating is superior toelectroless Au plating in view of reliability. As mentioned above, itmay occur that the plating lead line formed in the upper copper foil iscut. At this time, the gold coat 408 can be formed to a preferredthickness with electric power supplied through the connection throughhole 406 from the plating lead line of the lower copper foil 401 b.

Following the electrolytic Au plating, the dry film used as the platingresist is removed with a peeling solution and the plating lead line iscut using a router or a dicing process.

Then, the solder ball pad 409 a is coated with OSP to form anOSP-treated surface 409 b.

With reference to FIGS. 5A to 5H, a method for fabricating asemiconductor package substrate in which a circuit layer on a wirebonding side is different in thickness from that on a ball pad side areshown in a stepwise manner in accordance with another embodiment of thepresent invention.

FIG. 5A is a cross sectional view of a CCL 500 comprising an insulationlayer 502, made from, for example, epoxy, with copper foil 501 a and 501b bonded using an adhesive to respective opposite sides of theinsulation layer.

Then, as shown in FIG. 5B, a dry film 503 is deposited on the copperfoil 501 b of the ball pad side in order to be used as a mask in halfetching the copper foil 501 a of the wire bonding pad side.

FIG. 5C is a cross sectional view after the entire copper foil 501 a ofthe wire bonding pad side is half etched to a predetermined thickness,with the dry film 503 protecting the copper foil 501 b of the solderball pad side, followed by removing the dry film 503 from the copperfoil 501 b of the solder ball pad side.

There is a need for reinforcing the copper foil 501 a in the dummyregion of the wire bonding pad side in order to prevent the CCL fromcurling. For this, as shown in FIG. 5D, the copper foil 501 a of thewire bonding pad side is coated with a dry film 504 a which is open at aportion corresponding to the dummy region of the wire bonding pad sidewhile a blanket of a dry film 504 b is deposited as a mask over the ballpad side.

Afterwards, the exposed copper foil 501 a is plated with copper 505 toincrease the thickness of the copper foil in the dummy region of thewire bonding pad side, thereby preventing the CCL from curling, as shownin FIG. 5E. Following the formation of the copper coat 505, the dryfilms 504 a and 504 b respectively deposited over the copper foil 501 aof the wire bonding pad side and the copper foil 501 b of the ball padside are removed.

Since the copper foil 501 a on the wire bonding side in the unit regionbecomes thin, there is possibility that a circuit pattern formed thereonmight be cut. Particularly, when the plating lead line is cut, a platingprocess for a wire bonding pad may not be conducted.

For this reason, as shown in FIG. 5F, a through hole 506 is drilled andplated to form a connection through hole 507 for connecting the copperfoil 501 a on the wire bonding pad side and the copper foil 501 b on theball pad side. The connection through hole 507 serves as an electricbridge between the lower foil 501 b and the upper foil 501 a so that theplating lead line (not shown) formed in the lower copper foil 501 b iselectrically connected with the plating lead line (not shown) formed inthe upper copper foil 501 a. Even if the plating lead line of the uppercopper foil 501 a is cut, as will be described later, a gold platingprocess can be conducted to form a gold coat 509 b (FIG. 5H) on a wirebonding pad 509 a (FIG. 5H) using the plating lead line of the lowercopper foil 501 b, which is connected through the connection throughhole 507 to the wire bonding pad 509 a.

Preferably, the connection through hole 507 is formed at four corners613 of the unit region 611, as shown in FIG. 6. The reason is that amain plating lead line (not shown) usually passes through the fourcorners 613. That is, when the main plating lead line is cut, the goldplating cannot assure the thickness of the plated gold coat 509 b. Thus,even if the main plating lead line of the upper copper foil 501 a iscut, the presence of the connection through hole 507 at the four corners613 allows an electric current to be provided through the main platinglead line of the lower copper foil 501 b, thus assuring the thickness ofthe gold coat. FIG. 6 shows a semiconductor package substrate 610 inaccordance with an embodiment of the present invention, which is dividedinto a unit region 611 comprising a semiconductor device mountingportion 611 a and an outer circuit pattern 611 b, and a dummy region 612around the unit region 611.

Returning to FIG. 5F, patterned dry films 508 a and 508 b for theformation of circuit patterns on the wire bonding pad side and the ballpad side are deposited over the copper foils 501 a and 501 b,respectively.

FIG. 5G is a cross sectional view after the copper foils 501 a and 501 bare selectively etched using an etchant, with the patterned dry films508 a and 508 b serving as etching resists, followed by removing the dryfilms 508 a and 508 b with a peeling solution. Upon this patternetching, a plating lead line to be used for gold plating is concurrentlyformed in the same manner.

Afterwards, the resulting CCL structure is coated with solder resists511 a and 511 b which are then exposed to light, developed, and dried,as shown in FIG. 5H.

In order to plate only the wire bonding pad 509 a with gold, a dry film(not shown) is applied on the solder pad side of the substrate, exposedto light and developed. Using a plating lead line, the wire bonding pad509 a is plated with gold 509 b, with the dry film serving as a platingresist. As mentioned above, it might occur that the plating lead lineformed in the upper copper foil is cut. At this time, the gold coat 509b can be formed to a preferred thickness with electric power suppliedthrough the connection through hole 507 from the plating lead line ofthe lower copper foil 501 b.

Following the electrolytic Au plating, the dry film used as the platingresist is removed with a peeling solution and the plating lead line iscut using a router or a dicing process.

Then, the solder ball pad 510 a is coated with OSP to form anOSP-treated surface 510 b.

As described hereinbefore, the unit region of the wire bonding pad sidecan be formed to a small thickness in accordance with the presentinvention, thereby realizing fine patterns on the semiconductor packagesubstrate according to the present invention.

In addition, the CCL of the present invention can be prevented fromcurling by maintaining the dummy region of the wire bonding pad side ata predetermined thickness.

Examples are described in terms of the preferred embodiment of presentinvention. However, it should be understood that such disclosure is notlimited to the explicit description of the present invention. Thedescription and the claims of the present invention are to beinterpreted as covering all alterations and modifications within thetrue scope of this invention.

1. A method for fabricating a semiconductor package substrate,comprising: preparing a copper clad laminate, in which the insulatinglayer is sandwiched between two copper foils; depositing a secondetching resist over a first side of the copper clad laminate and halfetching the copper foil on a second side of the copper clad laminate;removing the second etching resist deposited on the first side of thecopper clad laminate; depositing on the second side of the copper cladlaminate a first plating resist which is open at a portion correspondingto the dummy region of the copper clad laminate; and plating the secondside of the copper clad laminate and removing the first plating resist;depositing a first etching resist on both sides of the copper cladlaminate; forming circuit patterns on the first etching resist,constructing circuits including a wire bonding pad and a ball pad in thecopper foils of the copper clad laminate using the first etching resist,and removing the first etching resist; applying a solder resist to thecopper clad laminate in such a way to expose the wire bonding pad andthe ball pad; and plating the wire bonding pad with gold and subjectingthe ball pad to surface treatment.
 2. The method according to claim 1,further comprising forming a connection through hole through which aplating lead line formed in the first circuit layer of the copper cladlaminate is electrically connected with a plating lead line formed inthe second circuit layer of the copper clad laminate, after thepreparation of the copper clad laminate.
 3. The method according toclaim 2, wherein the connection through hole is formed within the unitregion of the copper clad laminate and at corners of the unit region.